激光诱导沉积高粘度银浆制备微结构的研究
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国家自然科学基金项目(No.11172072);国家自然科学基金项目(No.51175091)资助


High-viscosity silver paste deposited by laser induced forward transfer
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    摘要:

    激光诱导向前转移是近些年来兴起的一种微加工技术,可以用来转移金属材料、生物材料和各向异性材料等。进行了利用纳秒激光诱导沉积高粘度导电银浆的实验研究,并对接收层上沉积的银浆进行观察分析,探讨了激光脉冲能量和与接收层的距离对沉积效果的影响,分析了沉积过程,沉积出连续银浆导线,并分析其导电特性。实验发现,当激光脉冲能量为87 μJ,与接收层的距离为40 μm时,沉积点均匀稳定,直径为一百多微米。通过调节三维平台带动靶材移动,用交叉打点的方法进行沉积,可制备出连续银浆导线,导线的宽度约100 μm,电阻率达6.12×10-8 Ωm,与靶材的电阻率相差不大,可以用于微电路和微传感器等的制备。一维线状连续微结构的成功制备,为以后沉积二维微结构,甚至三维结构奠定了基础。

    Abstract:

    Laser induced forward transfer(LIFT) is a micro fabrication technology arising in the recent decades,which has been successfully applied in the transfer of materials including metal,biological and anisotropic materials.An experimental research on the LIFT of high-viscosity conductive silver paste was carried out.The deposited silver paste on acceptor was observed and analyzed.And the effect of pulse energy and donor-acceptor distance on experimental results was discussed,and conduction characteristics of silver paste were analyzed.The experimental results show that when laser pulse energy and donor-acceptor distance is 87 μJ and 40 μm,respectively,the silver paste is uniform,stable and about 100 μm in diameter.By adjusting the three-dimensional platform with moving donor and depositing alternately,a continuous line of silver paste is achieved successfully.The width of line is about 100 μm,and the resistivity is 6.12×10-8 Ωm.It is expected that the method can be applied in the fabrication of micro-circuit and micro circuits.One dimensional linear continuous micro-structure has been fabricated successfully,which lays the foundation for fabrication of two dimensional micro-structure,even three dimensional micro-structure in the next work.

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李洪辉,黄志刚,杨青天,邓宇.激光诱导沉积高粘度银浆制备微结构的研究[J].激光与红外,2017,47(8):943~947
LI Hong-hui, HUANG Zhi-gang, YANG Qing-tian, DENG Yu. High-viscosity silver paste deposited by laser induced forward transfer[J]. LASER & INFRARED,2017,47(8):943~947

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  • 在线发布日期: 2017-08-29
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