飞秒激光辅助制备熔石英表面的网格状微流体
DOI:
作者:
作者单位:

作者简介:

通讯作者:

中图分类号:

基金项目:

国家自然科学基金重大项目(No.11574221)资助


Fabrication of microfluidic on fused silica glass surface assisted by femtosecond laser
Author:
Affiliation:

Fund Project:

  • 摘要
  • |
  • 图/表
  • |
  • 访问统计
  • |
  • 参考文献
  • |
  • 相似文献
  • |
  • 引证文献
  • |
  • 资源附件
  • |
  • 文章评论
    摘要:

    报道了一种利用飞秒激光直写后再用化学腐蚀熔石英表面制备得到网格状微流体沟道,然后在其表面覆盖一层PDMS薄膜制备网格状半密闭微流体通道的方法。微流体沟道的形成机制可以定义为飞秒激光辐照导致基底材料改性,而改性区域对HF水溶液的溶解度增强。使用光学显微镜和扫描电子显微镜(SEM)表征了网格状微流体通道的形貌。此外,为了测试该微流体结构的流动特性,进行了液体注入实验。

    Abstract:

    A fabrication method of networked semi-occlusive microfluidic was reported.This method uses femtosecond laser direct writing(FLDW) followed by chemical etching and covering a thin layer of polydimethylsiloxane(PDMS) film on fused silica glass substrate.The microfluidic channel formation mechanism is identified as substrate material modification caused by femtosecond laser irradiation,and modified areas can increase the solubility of hydrofluoric(HF) acid solution.The morphologies of networked microfluidic were characterized by using optical microscope and scanning electronic microscope.Furthermore,in order to test flowing characteristics of the microfluidic,the experiment of liquid injection was carried out.

    参考文献
    相似文献
    引证文献
引用本文

李广,冯国英,王树同,张华,王竹萍,周寿桓.飞秒激光辅助制备熔石英表面的网格状微流体[J].激光与红外,2017,47(8):948~952
LI Guang, FENG Guo-ying, WANG Shu-tong, ZHANG Hua, WANG Zhu-ping, ZHOU Shou-huan. Fabrication of microfluidic on fused silica glass surface assisted by femtosecond laser[J]. LASER & INFRARED,2017,47(8):948~952

复制
分享
文章指标
  • 点击次数:
  • 下载次数:
  • HTML阅读次数:
  • 引用次数:
历史
  • 收稿日期:
  • 最后修改日期:
  • 录用日期:
  • 在线发布日期: 2017-08-29
  • 出版日期: