Aiming at the high sensitivity detection requirement of broadband surface acoustic wave (SAW),a set of SAW detection system based on orthogonal polarization differential interferometry was designed .In experiment,the debugging effect of the system was evaluated according to the visibility of the interference fringes and the size of the differential signal.The system is tested and calibrated by a piezoelectric ceramic nano-displacement stage and a SIOS interferometer,the minimum static and dynamic displacement of the system was obtained.The noise signal of each component o the system was analyzed,and the corresponding suppression methods were put forward.At last,the system is measured repeatedly,and the laser SAW signals on the aluminum and silicon samples are detected on the system.This study provides a scientific and feasible method for the performance evaluation of SAW detection system and a reliable measurement method for the application of SAW technology in nondestructive testing.
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刘雪莲,冯保华,林滨,李艳宁.基于偏振差分干涉技术声表面波检测系统研究[J].激光与红外,2018,48(10):1231~1237 LIU Xue-lian, FENG Bao-hua, LIN Bin, LI Yan-ning. Research on SAW detection system based on optical interference technology[J]. LASER & INFRARED,2018,48(10):1231~1237