The influence of etching time (bromomethanol,bromine volume ratio of 0.05%) on the surface roughness,total thickness variation,infrared transmittance,Zn value and half width at half maxima of X ray diffraction (FWHM) of CZT (211) B substrate were analyzed,in the paper.It was found that the surface roughness of the substrate increased from 0.5 nm to 1.5 nm even if the bromine methanol solution,which bromine volume ratio is 0.05%,was used for 5 seconds.With the increase of etching time,the total thickness deviation (TTV) of CZT (211) B substrate gradually increases.The Zn value of two samples using bromomethanol as the polishing solution was significantly lower than that using ammonia as the polishing solution.Meanwhile,the FWHM and infrared transmittance of the two samples were consistent with variation trend of etching time,but different from that using ammonia as the polishing solution.It is indicated that different polishing solution affect the surface state of CZT (211) B substrate,such as Zn value and surface damage layer.