MEMS technology is a widely-used new rising microtechnology. It can integrate functions of information getting ,processing and actuating into a whole MEMS or MOEMS provided with miniature , smart ,actuating ,integrated ,low cost and technology compatible characteristics. that technology has been introduced into infrared research field for its superiority and shown to be an absorbing way. The paper briefly describes its main characteristics a nd technologles and then gives in detail its applications in infrared devices.