AlGaN /GaN分布布拉格反射镜的设计与表征
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    摘要:

    设计了反射中心波长为500nm的Al0. 3 Ga0. 7N /GaN和AlN /GaN两种分布布拉格反射 镜(DBR) ,并采用光学传递矩阵方法对其光谱反射率进行了理论上的模拟。采用金属有机物化学气相淀积(MOCVD)技术在蓝宝石衬底上制备了样品。实际测量的样品反射谱中有明显的反射峰,但峰值波长与理论设计有偏差,峰值反射率也比理论设计值偏低。SEM和AFM测量结果表明:这是由生长层厚与设计的偏差和界面不平整引起的。

    Abstract:

    Al0. 3 Ga0. 7N /GaN and AlN /GaN distributed Bragg reflectors (DBR ) with a target center wavelength of 500nm were designed, and simulation with a transfer-matrix-method ( TMM) was performed to give their spectral re- flectivity. The corresponding two samp leswere grown bymetal-organic-chemical-vapor-deposition (MOCVD) on sap-phire substrate. It shows from the measured reflectivity spectrum of each samp le that obvious reflectance peak occurs, but the centerwavelength has some deviation from the designed value and the peak reflectance value is lower than ex- pected. These attribute to the variation of the real layer thickness and the uneven interfaces, which can be app roved from the SEM and AFM measurement.

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姬小利 江若琏 李 亮 谢自力 周建军. AlGaN /GaN分布布拉格反射镜的设计与表征[J].激光与红外,2005,35(11):
.[J]. LASER & INFRARED,2005,35(11):

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  • 在线发布日期: 2006-01-25