The spacial distribution of etch pits is studied by selected different etchants such as Nakagawa, Everson, EAg1 and EAg2 etchants. It is found that the etch pits on the two surfaces of ( 111) samp les with thickness -1μm have not one2to2one corresponding relation. These resultsmean that etch pits on the CdZnTe surface don’t origin from threading dislocations in thematerials. The etch pits lookmore like p recip itations, based on the spatial location property and the change of EPD during the heat treatment. So itmay be incorrect to use EPD values to describe the dislocation densities of CdZnTe materials.