Evaluation and measurement of surface profiles are very important especially to short ! wavelength optical research. A linear system treatment of short!wavelength surface scattering theory is introduced, and based on this, a new inverse scattering mathematical model of soft X!ray grazing incidence optics is established. By using these scattered light distributions of super!smooth surfaces measured by a soft X!ray reflectometer, the surface profiles of super!smooth surfaces are computed by means of inverse scattering mathematical model of soft X!ray grazing incidence optics. The calculating results are in accordance with those measured by WYKO. It can be concluded that the soft X!ray grazing incidence optical scattering method can calculate micro!roughness and surface auto correlation function of smooth surface accurately, and can give optical surface profiles intuitively.