The modelocking principle and the manufacture method of semiconductor saturable absorption mirror are introduced. By analyzing the behavior that ultrashort pulse acts on semiconductor material , some methods to increase the anti－damage threshold are put forward , such as doping in absorption layer , annealing , widening the area grown at low temperature , surface heat sink and so on. In experiment , several semiconductor saturable absorption mirrors could work and obtain stable passive modelocking pulse output after annealing and being coated with dielectric film.