Considering the effects of the thickness of the film between the solid immersion lens(SIL) and the microscopy sample,the optical field distribution of the SIL system is analyzed using the vector diffraction theory.The analyses and calculations show that the intensity of spot,spot size and sidelobe intensity oscillate with the thickness of the film.When the thickness of the film is given,the spot size and sidelobe intensity is basically unchanged in the vicinity of the sample's surface,but the intensity of s...