HgCdTe/CdZnTe晶格失配与X光衍射貌相的关系研究
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国家自然科学基金项目(No.60606026)


Relationship between Lattice Mismatching and X ray Topography of HgCdTe/CdZnTe
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    摘要:

    文章采用富Te水平推舟液相外延工艺在CdZnTe衬底上生长了HgCdTe外延薄膜。研究了外延薄膜/衬底晶格失配度、X光衍射貌相、红外焦平面器件探测率三者之间的关系。对于HgCdTe外延层的X光衍射貌相我们将其大致分为五类,分别是Crosshatch貌相、混合貌相、均匀背景貌相、Mosaic貌相以及由衬底质量问题引起的沟壑状貌相,采用Crosshatch貌相和混合貌相材料所制备的红外焦平面器件,平均来说其探测率(D*)较高。X射线双轴衍射的实验结果表明,当外延层与衬底的晶格失配度为~0.03%时,外延层会呈现明显的Crosshatch貌相;而当失配度减小时,会逐渐呈现出混合貌相、均匀背景貌相、直至失配度为负值时呈现Mosaic貌相。因此,对于特定截止波长的HgCdTe焦平面器件,可以通过控制HgCdTe/CdZnTe之间的失配,生长出符合我们要求的貌相的碲镉汞外延材料,从而来提高焦平面器件的性能。

    Abstract:

    The HgCdTe layers were grown by Terich liquid phase epitaxy in a horizontal slider system. The relationship among the lattice mismatching of HgCdTe/CdZnTe, the Xray topography and the detectivity(D*) of the IRFPA was studied. For HgCdTe layer of Xray diffraction topography,we will classify it roughly into five categories: Crosshatch pattern, mixing pattern, uniform background pattern, mosaic pattern as well as by the quality of the substrateinduced ravine topography, the Crosshatch pattern and the mixing pattem materials prepared for IRFPA have higher detectivity on average. The results of Xray diffraction show that when the lattice matching of HgCdTe/CdZnTe about 0.03% ,the Crosshatch pattern appears clearly;When the lattice matching of HgCdTe/CdZnTe reduced, the Crosshatch pattern become into mixing pattern, uniform background pattern gradually and when the epilayer lattice parameter is smaller than that of the substrate(negative mismatch),the Crosshatch changes into a Mosaic structure. Therefore, for the specific cutoff wavelength devices, if we want to enhance the detectivity of the IRFPA, we can control the lattice matching of HgCdTe/CdZnTe in order to grown the epitaxy materials of meeting our requirements.

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焦翠灵,赵守仁,陈新强,魏彦锋. HgCdTe/CdZnTe晶格失配与X光衍射貌相的关系研究[J].激光与红外,2007,37(13):910~914
JIAO Cui-ling, ZHAO Shou-ren, CHEN Xin-qiang, WEI Yan-feng. Relationship between Lattice Mismatching and X ray Topography of HgCdTe/CdZnTe[J]. LASER & INFRARED,2007,37(13):910~914

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