Abstract:The HgCdTe layers were grown by Terich liquid phase epitaxy in a horizontal slider system. The relationship among the lattice mismatching of HgCdTe/CdZnTe, the Xray topography and the detectivity(D*) of the IRFPA was studied. For HgCdTe layer of Xray diffraction topography,we will classify it roughly into five categories: Crosshatch pattern, mixing pattern, uniform background pattern, mosaic pattern as well as by the quality of the substrateinduced ravine topography, the Crosshatch pattern and the mixing pattem materials prepared for IRFPA have higher detectivity on average. The results of Xray diffraction show that when the lattice matching of HgCdTe/CdZnTe about 0.03% ,the Crosshatch pattern appears clearly;When the lattice matching of HgCdTe/CdZnTe reduced, the Crosshatch pattern become into mixing pattern, uniform background pattern gradually and when the epilayer lattice parameter is smaller than that of the substrate(negative mismatch),the Crosshatch changes into a Mosaic structure. Therefore, for the specific cutoff wavelength devices, if we want to enhance the detectivity of the IRFPA, we can control the lattice matching of HgCdTe/CdZnTe in order to grown the epitaxy materials of meeting our requirements.