The composition of anodic oxides on InSb substrate was explored using Xray photoelectron spectrometer (XPS),all the composition′s vertical distribution was researched.The configuration of the oxides was observed and the microcosmic pictures of the oxide film was taken using scanning electron microscope(SEM).The structural and electrical characteristics of the InSb anodic oxides would be analysed on base of data in this article.关键词：阳极氧化；InSb衬底；电流密度Key words：anodic oxide;InSb substrate;current density