ZnO films were grown on (001) LiNbO3 substrates by magnetron sputtering.Annealing of ZnO films was performed in air for 1h at 800℃.The structural and optical properties of ZnO thin films on LiNbO3 substrates were investigated.XRD patterns showed that the as-grown and the annealed ZnO films grown on LiNbO3 substrates had c-axis preferential orientation,and the diffraction peaks shift to the higher angle with the annealing,the crystallinity of the ZnO films grown on LiNbO3 substrates was improved by annealing.The transmittance of the ZnO thin films in the visible range was improved after annealing and optical band gap of the ZnO thin films annealed was red shift.The PL spectra showed that the intensity of the UV near-band-edge peak was increased after annealing,while the intensity of visible peak decreased.
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王银珍,初本莉,何琴玉,徐军.磁控溅射法在LiNbO3衬底上制备ZnO薄膜及性能研究[J].激光与红外,2008,38(8):796~798 WANG Yin-zhen, CHU Ben-li, HE Qin-yu, XU Jun. Growth and Properties of ZnO Thin Films on LiNbO3 Prepared by Magnetron Sputtering[J]. LASER & INFRARED,2008,38(8):796~798