CCD arrays can be disturbed or damaged when subjected to laser irradiation.The multilayer-thermal-mechanical physical model of CCD irradiated by pulsed laser is set up based on heat conduction and thermal elastic mechanics theories,the heat conduction differential equation and stress-balance equation are solved by the finite elements method.The transient temperature field,thermal stress field and the most probably damaged position are obtained,with CCD pixel structure and operation mode presented,the influences of laser parameters and each damaged layer to CCD imaging formation are discussed as well.