Abstract:Zinc oxide (ZnO) has ideal qualities for various optoelectronic devices,such as UV photo-detectors,emitting diodes and laser diodes,based on p-n junctions.However,while high quality n-type ZnO has been available for many years,the fabrication of high quality reproducible and low resistivity p-type conduction for ZnO thin films is proven difficult because of the strong selfcompensation effect of intrinsic defects and other reasons.By summering and analyzing of some related papers published in recent years,this review focuses on the developments in p-type doping processes,and the characteristics including hole concentration,mobility and resistivity of p-type ZnO thin films prepared by different methods are listed.