高能激光器中晶体薄膜的研究与特性分析
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Research and analysis of optical coatings for crystal in high power lasers
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    摘要:

    介绍了用于大功率YAG激光器以及中红外激光器中晶体光学薄膜的用途、特性和制备方法。利用计算机膜系优化软件对膜系进行设计后,得到了损耗小、利于制备、重复性好的膜系结构。为了详细说明,以YAG板条晶体和ZnGeP2晶体为例,讨论了晶体不同工作表面薄膜在研究与镀制过程中的潮解、吸收以及污染等主要技术问题。通过特性测试和激光损伤试验对比,验证了以APS离子源辅助沉积的膜层损伤阈值增加,附着力增强,机械强度和环境稳定性得到了明显改善。目前相关的晶体薄膜应用在两种高能激光器中分别达到了16 kW/cm2和5 kHz下

    Abstract:

    This paper introduces the primary purpose,a series of characteristics and coating methods of crystal optical coatings in high power YAG lasers and solid middle infrared lasers.The coating-designs with low loss and high reliability have been developed based on the using of computer coating optimization software.In order to explain main technique problems of these coatings on laser crystal in details,such as deliquescence,absorption and contamination,we discussed coating process and films on different working-facies,taken YAG slab and ZnGeP2 as examples.According to the contrastive results of characteristic analysis and laser damage threshold,it has been found that ion assistance deposition technique increase the packed density of films,enhances the adhesion and obviously improves mechanical strength and environmental stability.Presently,these coatings of laser crystal have been used in high power YAG lasers and mid-IR solid lasers.The effects are 16 kW/cm2(slab)and 10 W output at 5 kHz(ZnGeP2).

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岳威,席喆,洪冬梅,刘国喜,韩永昶,刘连泽,杨蕊.高能激光器中晶体薄膜的研究与特性分析[J].激光与红外,2009,39(9):974~977
YUE Wei, Xi Zhe, HONG Dong-mei, LIU Guo-xi, HAN Yong-chang, LIU Lian-ze, YANG Rui. Research and analysis of optical coatings for crystal in high power lasers[J]. LASER & INFRARED,2009,39(9):974~977

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