By using traditional method,dual-galvanometric laser scanning manufacturing errors is reduced,but for farther precision improving,a new method,which use image processing is introduced.Through the second closed-loop error revision,the precision is better than 3 μm in the area of 10 mm×10 mm working face.
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郝俊明,邢刚,李江明.双振镜激光扫描加工误差精密校正[J].激光与红外,2009,39(12):1271~1274 HAO Jun-ming, XING Gang, LI Jiang-ming. Precise correction for dual-galvanometric laser scanning manufacturing[J]. LASER & INFRARED,2009,39(12):1271~1274