Preliminary study on infrared spectrophotometric determination of the organic impurity of high purity SiCl4 recycled from the sponge titanium process.SiCl4 is easy to hydrolyze when it is exposed in air,therefore,a sealing unit was designed to get the samples,including a sealing infrared sample cell which was made by ourself.The high purity SiCl4 was analyzed at the wave band of 4000~1000 cm-1 by FT-IR FTS4000 infrared spectrometer.Infrared spectrum showed that the absorption peak of SiHCl3 at 2257 cm-1 was not exsited，so no SiHCl3 in the samples was demonstrated by comparing with the spectrum of standard sample of high-purity SiCl4(99.9999%).Furthermore,the absorption peak of –OH at 3700～3500 cm-1 was analyzed quantitatively.As the polarity of CCl4 is similar to SiCl4 ，it was choosen as matrix solution.Triphenyl silanol was choosen as standard sample.The results showed correlation coefficient is 0.9963，molar absorptivity ε=108 L·mol-1·cm-1， the content of-OH was analyzed quantitatively.