SOI material is an important kind of optical waveguide materials for silicon-based optoelectronics applications.In this paper,the common preparation methods of SOI materials,including SIMOX-SOI,BE-SOI,Smart Cut,are introduced at first and their different characteristics are compared.Then,the common technology to make optical waveguide using SOI materials,including photolithography and etching,are introduced.Among which,the etching technology is divided into wet-etching and dry-etching.