Loss of optical thin film mainly involves absorption and scattering.Accurate determination of its value is the precondition of coating high quality laser film.This paper introduces the principle,characteristics and test method of cavity ring-down detection for high reflectance coatings.Taking 1064 nm and 1311 nm high reflection films as examples,after accessing parts per million(ppm)weight loss of ZrO2 and Ta2O5,we use Losspro laser test equipment to compare different thin film materials and coating methods.We conclude that the rate control and ion beam energy for the same high reflective thin film materials have obvious effects.The research of cavity ring-down detection offers basis for the manufacture of thin films.
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岳威,韩永昶,东野斯阳,武淑明,赵明艳.谐振腔衰荡法检测激光高反射薄膜损耗[J].激光与红外,2012,42(4):413~416 YUE Wei, HAN Yong-chang, DONGYE Si-yang, WU Shu-ming, ZHAO Ming-yan. Using cavity ring-down to test laser high reflective thin film′s loss[J]. LASER & INFRARED,2012,42(4):413~416