Abstract：Semiconductor silicon is a kind of electron material,and is also a kind of appropriate photon material.Mature micro-electronics processes provide solid foundation for silicon photonics.The recent progress of Si-based optical waveguide technology especially the SOI（silicon-on-insulater）technology reported on GFP2011 has been overviewed.The modulator,subwavelength grating,hybrid integration,packaging and waveguide new process are introduced in detail.