CdTe surface passivation layers were deposited by evaporation on (111) liquid phase epitaxy (LPE) grown HgCdTe epilayers.The processes of CdTe layer deposition were carried out at different temperatures ranging from 70 ℃ to 250 ℃.Furthermore,prepared samples were annealed at a temperature range between 150 ℃ and 300 ℃.Scanning electron microscope (SEM) and transmission electron microscope (TEM) were used to evaluate the profile and structure of CdTe passivation layers.The compositional properties were surveyed by secondary ion mass spectroscopy (SIMS).X-ray diffraction (XRD) characterized the crystal quality.The experimental results show that heating during the deposition process can eliminate the columnar and polycrystalline structure in course of general evaporation,and effectively improve the quality of CdTe passivation layers.The annealing treatment can provide further improvement.