The article reviews the progress of micro-fabrication by femtosecond laser at home and abroad in recent years.Femtosecond laser pulses have undergone through the laboratory process to become a useful tool for material micro-nano-processing in industrial field.In this paper,we introduce the process of femto-second laser precise micro-nanofabrication.Two different fabrication mechanisms are described which are laser ablation and two photo polymerization.Finally,the existing problems and future development of micro-manufacture by femtosecond laser are discussed.