Based on thin Nb5N6 film,whose temperature coefficient of resistance (TCR) is as high as-0.7% K-1 at room temperatures,a bolometer integrated with a planar bow-tie antenna has been designed and fabricated for detecting signals at 100GHz without cooling.The best attainable electrical responsivity of the bolometer is about-400 V/W at bias current of 0.4 mA.The electrical noise equivalent powers (NEP) is 1.5(10-11W/Hz for a modulation frequency of 200 Hz and 9.5(10-12W/Hzfor the modulation frequency above 10kHz.
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鲁学会.一种用于探测太赫兹信号的测辐射热仪[J].激光与红外,2013,43(10):1149~1152 LU Xue-hui. Bolometer for terahertz signal detection[J]. LASER & INFRARED,2013,43(10):1149~1152