基于SOI悬浮波导的中红外热光调制器的分析
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Analysis of mid-infrared thermo-optic modulator based on SOI suspended waveguide
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    摘要:

    设计了一种基于SOI(Silicon-On-Insulator)单模中红外低损耗悬浮脊波导的MMI-MZI型热光调制器。对单模悬浮脊波导和基于悬浮波导的调制器的参数进行了分析,并给出了工艺实现方法。在波长5.4 μm,采用3D-BPM(Beam Propagation Method)方法对热光调制器的模型进行了传输特性的仿真。结果表明在加热电极长度为3 mm时,热光作用区通过很小的温度变化ΔT=5.3℃时,可以实现消光比为-40 dB。该中红外器件尺寸大,设计和制作容差大,在中红外硅基光子学有着重要的应用。

    Abstract:

    The MMI-MZI thermo-optic modulator based on SOI (Silicon-On-Insulator) single-mode mid-infrared low-loss suspended ridge waveguide is designed and analyzed. Parameters of the single-mode suspended ridge waveguide and the modulator based on it are analyzed,and the implementation method is given. At the wavelength of 5.4 μm,the transmission characteristics of the thermo-optic modulator model is simulated with 3D-BPM (Beam Propagation Method) method. The results show that a very small temperature change of 5.3℃in the thermo-optic area can result in a extinction ratio of-40dB when the heating electrode length is 3 mm. The dimensional tolerance of the MIR device is large,so it is easy to realize. The design will have important applications in the mid-infrared silicon photonics.

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檀亚松,余辉,郝寅雷,杨建义,江晓清.基于SOI悬浮波导的中红外热光调制器的分析[J].激光与红外,2013,43(11):1248~1251

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  • 在线发布日期: 2013-10-31
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