朱腾飞,李辉,李明燃,王彬,彭中良,赖建军.基于MEMS工艺的集成红外气体传感器工艺研究[J].激光与红外,2014,44(5):533~538
ZHU Teng-fei, LI Hui, LI Ming-ran, WANG Bin, PENG Zhong-liang, LAI Jian-jun. Research on process of integrated-infrared gas sensor based on MEMS technology[J]. LASER & INFRARED,2014,44(5):533~538