氧化热处理对VO2薄膜红外光学相变特性的影响
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脉冲功率激光技术国家重点实验室主任基金项目(No.SKL2013ZR03)资助


Effects of oxidational annealing on infrared optical phase transition properties of VO2 thin films
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    摘要:

    采用直流磁控溅射法在硅基底上制备VO2薄膜,并对薄膜氧化热处理。分别对热处理前后薄膜进行X射线衍射(XRD)、傅里叶变换红外光谱(FTIR)透射率测试,分析了热处理对VO2薄膜晶相成分与红外透射率相变特性的影响。实验分析表明,经热处理的VO2发生非晶态向晶态转变,单斜金红石结构VO2(011)晶体具有明显择优取向,晶粒尺寸均匀度提高,且薄膜的红外透射率具有明显相变特性,相变温度为60.5℃,3~5 μm、8~12 μm波段的红外透射率对比值达到99%,适合应用于红外探测器的激光防护研究。

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    VO2 thin films were prepared by DC magnetron sputtering on Si substrate,and then were annealed by oxidation. XRD and FITR were employed to study the effects of oxidational annealing on the crystal composition and infrared transmission properties of VO2 thin films. The results of analysis show that the VO2 crystal after annealing has changed from non-crystalline structure to crystalline structure. The size of monoclinic rutile structure VO2 (011) which has a better crystal orientation is bigger. After oxidational annealing,the VO2 thin films possess a obvious phase transition properties with uniform size of crystal,the phase transition temperature is 60.5 ℃,and the change range of infrared transmission rate at 3~5 μm and 8~12 μm has reached to 99%. VO2 thin films which have obvious phase transition properties in infrared transmission are ideal material for the research for protecting infrared detector from laser attacking.

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徐凯,路远,凌永顺,乔亚,唐聪.氧化热处理对VO2薄膜红外光学相变特性的影响[J].激光与红外,2015,45(1):53~57
XU Kai, LU Yuan, LING Yong shun, QIAO Ya, TANG Cong. Effects of oxidational annealing on infrared optical phase transition properties of VO2 thin films[J]. LASER & INFRARED,2015,45(1):53~57

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  • 在线发布日期: 2015-01-22
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