An equivalent pixel circuit for 300×400 infrared focal plane array readout circuit structure is presented in this paper. The circuit′s electrical characteristics are equivalent to that of the vanadium oxide (VOx film) micro-mechanical systems (MEMS). It can simulate the variation of the branch current when the MEMS pixel changes. Before the growth of physical structure of MEMS (VOx film),the infrared array detector readout circuit has been fabricated. The equivalent pixel circuit is designed to test the electrical properties of the readout circuit. It can remove the defective products and reduce packaging costs. The circuit has been designed and fabricated with a GlobalFoundry 0.35 μm process. The test results indicate that the equivalent circuit has the same electrical properties as the MEMS pixel when the integrating current is 0~200 nA.
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戴山彪,陈力颖,邢海英,王健,杨晓龙.用于红外焦平面阵列的等效像元电路设计[J].激光与红外,2015,45(2):171~175 DAI Shan-biao, CHEN Li-ying, XING Hai-ying, WANG Jian, YANG Xiao-long. Design of equivalent pixel circuit for infrared focal plane array[J]. LASER & INFRARED,2015,45(2):171~175