用于红外焦平面阵列的等效像元电路设计
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国家自然科学基金项目(No.61204008)资助


Design of equivalent pixel circuit for infrared focal plane array
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    摘要:

    提出了一种用于300×400红外焦平面阵列读出电路的等效像元电路结构。该电路与氧化钒(VOx薄膜)制成的微机械系统(MEMS)的电特性等效,并能够模拟MEMS像元改变时支路电流的变化。红外面阵探测器读出电路在流片后,生长MEMS物理结构(VOx薄膜)前,该等效像元电路结构用于读出电路的电性能测试,从而剔除不良品,减少封装成本。该电路采用了GlobalFoundry 0.35 μm工艺设计并流片。测试结果表明,当积分电流为0~200 nA时,该等效像元电路的电性能与MEMS像元一致。

    Abstract:

    An equivalent pixel circuit for 300×400 infrared focal plane array readout circuit structure is presented in this paper. The circuit′s electrical characteristics are equivalent to that of the vanadium oxide (VOx film) micro-mechanical systems (MEMS). It can simulate the variation of the branch current when the MEMS pixel changes. Before the growth of physical structure of MEMS (VOx film),the infrared array detector readout circuit has been fabricated. The equivalent pixel circuit is designed to test the electrical properties of the readout circuit. It can remove the defective products and reduce packaging costs. The circuit has been designed and fabricated with a GlobalFoundry 0.35 μm process. The test results indicate that the equivalent circuit has the same electrical properties as the MEMS pixel when the integrating current is 0~200 nA.

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戴山彪,陈力颖,邢海英,王健,杨晓龙.用于红外焦平面阵列的等效像元电路设计[J].激光与红外,2015,45(2):171~175
DAI Shan-biao, CHEN Li-ying, XING Hai-ying, WANG Jian, YANG Xiao-long. Design of equivalent pixel circuit for infrared focal plane array[J]. LASER & INFRARED,2015,45(2):171~175

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  • 在线发布日期: 2015-03-23
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