Damage study in subsurface polishing technology of HgCdTe films is very important. An evaluation method for characterizing damage in subsurface polishing technology of HgCdTe films was elaborated,and the principles and functions of each measurement method were simply introduced. These methods have been used for the practice and the very valuable experiment results have been obtained. This investigation has very important direction significance for understanding damage in subsurface polishing technology of HgCdTe films and next technology optimization.