Based on the fabrication technology of MW HgCdTe,the recent research progress on molecular beam epitaxy growth of SW HgCdTe on Si composite substrate is reported.Through the original temperature calibration,the use of in situ measurements such as RHEED and pyrometry,the temperature controlling figure profile of MW MCT,a customized temperature controlling figure profile for SW MCT was built and optimized.The defects density of optimized Si based SW HgCdTe is less than 3000 cm-2 and the surface is smooth and uniform.SW/MW dual band HgCdTe has been also fabricated based on this technology.
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王经纬,高达. Si基短波碲镉汞材料分子束外延生长研究[J].激光与红外,2015,45(6):646~649 WANG Jing wei, GAO Da. Research on short wavelength HgCdTe film growth on silicon composite substrate by molecular beam epitaxy growth[J]. LASER & INFRARED,2015,45(6):646~649