VO2 will change from semiconductor to metal phase,which is a solid to solid phase-transition,when its temperature is about 68 ℃,and its optical and electrical properties will mutate after the phase-transition.This feature makes the VO2 thin films to be widely studied in fields of infrared smart window,optical switch devices,laser protective materials,adaptive stealth materials,etc.Preparation methods of VO2 thin films include magnetron sputtering,pulsed laser deposition,sol-gel,metal thermal evaporation method,etc.The ideal preparation parameters are the focus of current research.Preparation methods and application status of VO2 thin film are summarized,which gives reference for further studies in the properties and applications of VO2 thin film.
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杨玚,路远,杨华,徐凯.二氧化钒薄膜的制备和应用研究新进展[J].激光与红外,2015,45(8):875~882 YANG Yang, LU Yuan, YANG Hua, XU Kai. Research progress on preparation and application of vanadium dioxide thin films[J]. LASER & INFRARED,2015,45(8):875~882