激光防护中VO2薄膜的最佳膜厚计算
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脉冲功率激光技术国家重点实验室主任基金项目(No.SKL2013ZR03)资助


Optimum thickness calculation of VO2 thin films in laser protection
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    摘要:

    为实现VO2薄膜在激光防护应用中的最佳膜厚设计,采用椭圆偏振法测试分别得到Si基底VO2薄膜低温半导体态与高温金属态的光学常数,基于具有吸收特性薄膜的透射率计算理论,结合VO2薄膜用于激光防护的需求,计算得到适用于激光防护的最佳膜厚。为验证计算方法准确性,根据入射激光波长10.6 μm为例计算的最佳膜厚,采用直流磁控溅射法在Si基底上制备具有相应膜厚的薄膜,利用傅里叶变换红外光谱测试分析了该薄膜的红外透射率相变特性,结果表明其红外透射率具有明显相变特性,3~5 μm波段的红外透射率对比值达到99%,λ=10.6 μm 处相变前后的红外透射率分别为67.2%、4.2%,与理论计算透射率66.4%、3.3%误差较小,实测透射率对比值为93.8%,与理论预期95%基本相符,表明理论计算方法具有一定的准确性,根据最佳膜厚算法设计的VO2薄膜适合应用于红外探测器的激光防护研究。

    Abstract:

    In order to obtain optimum thickness of VO2 thin films in laser protection,optical constants of VO2 thin films at low and high temperature were measured by ellipsometry on Si substrate,and optimum thickness of VO2 thin films in laser protection was calculated based on the transmission theory of thin films with absorptive properties.Then VO2 thin films with specific thickness were prepared by DC magnetron sputtering,and FITR was employed to test and analyze the infrared transmission properties.The results show that the infrared transmittivity of the VO2 thin films with specific thickness has an obvious phase transition property.The relative change of infrared transmittivity rate at 3~5 μm can reach 99%.The measured infrared transmittivity at 10.6 μm before and after phase transition are 67.2%,4.2% respectively,and the rate of change is 93.8%,which are approximate to the calculated data 66.4%,3.3% and 95%,and prove the accuracy of the calculation method.The VO2 thin films which are designed by the calculation method of optimum thickness can be ideal material for laser protection of infrared detector.

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徐凯,路远,凌永顺,乔亚,唐聪.激光防护中VO2薄膜的最佳膜厚计算[J].激光与红外,2015,45(8):959~963
XU Kai, LU Yuan, LING Yong-shun, QIAO Ya, TANG Cong. Optimum thickness calculation of VO2 thin films in laser protection[J]. LASER & INFRARED,2015,45(8):959~963

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  • 在线发布日期: 2015-08-27
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