The metal films on Ge window are prepared by DC magnetron sputtering to satisfy the vacuum packaging requirement of MEOMS devices.The effect of different metal films on interface characteristics on Ge window was studied under the same heat treatment condition.The interface diffusion characteristics between different thin films and substrate were analyzed by Auger electron spectroscopy.Finally,adhesion strength is analyzed by using scratching tester.The results show that Ni can effectively prevent Au,and the interface between Ge and Cr diffuses intensively.Metal structure composed of Cr/Ni/Au can improve the adhesion strength of infrared window effectively.