The interaction mechanism of femtosecond laser with SiC was studied.The interaction effect of the mechanism of the femtosecond laser machining SiC materials and laser power density threshold,pulse width,frequency,overlap rate was explored,and the influence factors that cause a decrease of the free electron density were also analyzed within the scope of the laser pulse width.When the femtosecond laser transmits in the processed material,it has energy loss,which is caused by material surface reflection;because the “reflection and scattering” are generated by the collision of photoelectron and lattice after laser ionization,this leads to the energy loss of laser beam.Considering the above two energy losses,the existing theoretical model of femtosecond laser machining is optimized.Through the comparative study and experiment validation of free electron density,it can provide a reference for the interaction of the laser and material in the process of femtosecond laser machining.
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李晓宇,孙会来,赵方方,聂晓菊.飞秒激光加工SiC模型参数优化设计研究[J].激光与红外,2016,46(8):948~952 LI Xiao-yu, SUN Hui-lai, ZHAO Fang-fang, NIE Xiao-ju. Research on parameters optimization design of femtosecond laser machining SiC model[J]. LASER & INFRARED,2016,46(8):948~952