Many utensils are often used in infrared detector process, but metallic ions in utensils have great effect on the performance of infrared detector, so the superior utensil cleaning methods are selected to remove metallic ions in utensils. The residual metallic ions in utensils with different cleaning methods were measured and analyzed by ICP-MS, and the optimal cleaning method was obtained. This cleaning method is suitable for the different preparation technologies of infrared detector.