The hysteresis of piezoelectric transducers has significant impact on precise control systems. At present,the common methods of piezoelectric transducers hysteresis measurement have some disadvantages such as low accuracy and complex system,so they are difficult to realize high accuracy measurement. The current measurement methods of PZT were analyzed. The hysteresis of piezoelectric transducers was measured and analyzed based on microchip laser feedback interference system by using the scattered light on the surface of the object. The laser frequency-shifted feedback system does not need the target mirror,which means low demand for the measured target. It also has some advantages such as convenience and high resolution of nanometer level. The measurement method has significant guidance for piezoelectric transducers calibration in precise control systems.
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邓勇,江奕,刘宁,朱开毅.基于激光回馈干涉系统的PZT迟滞特性测量[J].激光与红外,2016,46(9):1060~1163 DENG Yong, JIANG Yi, LIU Ning, ZHU Kai-yi. Hysteresis measurement of piezoelectric transducers based on laser feedback interference system[J]. LASER & INFRARED,2016,46(9):1060~1163