Type Ⅱ InAs/GaSb superlattices have the characteristics of adjustable band gap,high quantum efficiency,low dark current,easy fabrication for large array,etc,so it is the main material for the third generation infrared detectors. Type Ⅱ InAs/GaSb superlattices was grown by MBE on GaSb substrate,and the defects of material surface were classified and its causes were analyzed. The influences of growth temperature,growth rate of GaSb,As/In ratio on defects were studied. Through the optimization of growth conditions,high quality type Ⅱ InAs/GaSb superlattices were obtained,which has a certain reference for the fabrication of high quality large format type Ⅱ InAs/GaSb superlattices infrared detectors.
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邢伟荣,刘铭,尚林涛,周朋,周立庆.分子束外延InAs/GaSbⅡ类超晶格的缺陷研究[J].激光与红外,2016,46(9):1106~1109 XING Wei-rong, LIU Ming, SHANG Lin-tao, ZHOU Peng, ZHOU Li-qing. Research on defects of type Ⅱ InAs/GaSb superlattices grown by MBE[J]. LASER & INFRARED,2016,46(9):1106~1109