Aiming at the trimming functional demand of the thick film hybrid IC,a multi-function active laser trimming machine is designed. Through online measurement of different parameters including the output voltage,protection current and signal circuit (duty cycle,frequency and phase),the machine can realize multifunction laser trimming. The control system of multi-function active laser trimming machine was mainly introduced. By analyzing the influence of the measuring length and slow precision on trimming precision and efficiency,a method that can both improve the precision and the efficiency is put forward to set the parameters. Multi-function active laser trimming machine can well satisfy the trimming function demand of the domestic thick film hybrid IC.
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梁进智,徐长彬,封芸,金越越.多功能有源激光微调机的系统设计[J].激光与红外,2016,46(12):1459~1462 LIANG Jin-zhi, XU Chang-bin, FENG Yun, JIN Yue-yue. Design of multi-function active laser trimming machine[J]. LASER & INFRARED,2016,46(12):1459~1462