多功能有源激光微调机的系统设计
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Design of multi-function active laser trimming machine
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    摘要:

    针对厚膜混合集成电路的功能微调需求,设计了一种多功能有源激光微调机。通过在线测量不同的产品参数,可实现多功能激光微调,其中包括输出电压修调,保护电流修调和信号电路调整(调测占空比、频率和相位)。本文重点介绍了多功能有源激光微调机的控制系统,通过分析测量步长和减速精度对修调精度和修调效率的影响,进而提出了自动修调方法中兼顾精度和效率的参数设置方法。多功能有源激光微调机很好地满足了国内厚膜混合集成电路功能微调需求。

    Abstract:

    Aiming at the trimming functional demand of the thick film hybrid IC,a multi-function active laser trimming machine is designed. Through online measurement of different parameters including the output voltage,protection current and signal circuit (duty cycle,frequency and phase),the machine can realize multifunction laser trimming. The control system of multi-function active laser trimming machine was mainly introduced. By analyzing the influence of the measuring length and slow precision on trimming precision and efficiency,a method that can both improve the precision and the efficiency is put forward to set the parameters. Multi-function active laser trimming machine can well satisfy the trimming function demand of the domestic thick film hybrid IC.

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梁进智,徐长彬,封芸,金越越.多功能有源激光微调机的系统设计[J].激光与红外,2016,46(12):1459~1462
LIANG Jin-zhi, XU Chang-bin, FENG Yun, JIN Yue-yue. Design of multi-function active laser trimming machine[J]. LASER & INFRARED,2016,46(12):1459~1462

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  • 在线发布日期: 2016-12-16
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