激光化学气相沉积石墨烯聚焦光斑测量研究
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国家自然科学基金项目(No.61575165);福建省科技计划重大专项(No.2015HZ002-1)资助


Focus facula measurement in graphene preparation by laser chemical vapor deposition
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    摘要:

    激光化学气相沉积(Laser Chemical Vapor Deposition,LCVD)石墨烯制备受聚焦光斑影响很大。实时检测光斑,可实现石墨烯LCVD法可控制备。设计聚焦光斑测量光学系统,提出一种基于圆拟合的改进算法检测光斑中心和半径,计算、标定光斑面积。该方法在圆拟合基础上加入了二值化、形态学处理及连通性判别等预处理方法。实验表明,该方法测得圆心位置与真值误差平均为5.58 pixel,光斑面积与真值误差平均为1.93×10-9 m2,优于传统的重心法和霍夫检测法,具有较快的计算速度和检测精度,可实现LCVD法制备石墨烯实验中聚焦光斑的非接触式测量,且对其他激光加工工艺的质量控制有借鉴意义。

    Abstract:

    The preparation of graphene by laser chemical vapor deposition(LCVD)is highly affected by the focal spot. Real-time measurement of light spot can be realized controllable preparation of graphene by LCVD method. The measuring optical system of focal facula was designed,and an improved method based on circle fitting method was presented to detect center and radius of focal spot,then focal spot area was calculated and calibrated. This method introduces some pretreatment methods,such as binaryzation,morphology processing,connectivity discrimination. Experiments show that the measured center position has average error of 5.58 pixel with true value,spot area has average error of with true value. It is better than the traditional gravity method and Hough algorithm and has faster computing speed and precision,which can realize non-contact measurement of the focus facula,and this study is of significance for quality control of other laser processing technology.

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刘婷婷,张建寰,林坤,李珊文.激光化学气相沉积石墨烯聚焦光斑测量研究[J].激光与红外,2017,47(4):437~442
LIU Ting-ting, ZHANG Jian-huan, LIN Kun, LI Shan-wen. Focus facula measurement in graphene preparation by laser chemical vapor deposition[J]. LASER & INFRARED,2017,47(4):437~442

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  • 在线发布日期: 2017-04-21
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