The application of MEMS mirror in the future compact laser imaging radar system was studied.Firstly,the features of MEMS mirror were introduced.Considering the application background of pulse laser imaging radar,the concerned problems in designing the system were analyzed.And then the driving module of MEMS mirror was designed.At last,the application of Lissajous scanning pattern is verified by simulation and imaging.
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张驰,岳娟,徐正平,葛军. MEMS摆镜在小型化激光成像雷达中的应用[J].激光与红外,2017,47(9):1149~1153 ZHANG Chi, YUE Juan, XU Zheng-ping, GE Jun. Application of MEMS mirror in compact laser imaging radar[J]. LASER & INFRARED,2017,47(9):1149~1153