After the preparation of the vanadium oxide thin film,annealing treatment is required to reduce the square resistance of the amorphous vanadium oxide film and improve the film crystallization characteristics.The conventional annealing methods take a long time and the annealing process will lead to the degradation of the device performance.The vanadium oxide thin films by laser precision control is treated by changing the laser power,the Gaussian spot morphology and the overlap rate.The effects of laser energy density and spot overlap rate on the sheet resistance,surface roughness and crystallinity of vanadium oxide thin films were studied.The experimental results show that when the laser power is 0.7 W,the spot overlap rate is 93.33% and the spot energy density is 62.2 mJ/cm2,the sheet resistance of annealed vanadium oxide thin film is obviously reduced,the surface of the film is smooth,and the crystallinity of vanadium oxide is better.