In order to solve the problem of 3D shape measurement,a three-dimensional shape measurement method based on laser shearing interference fringes was proposed.The method uses laser shearing interference to produce dense interference fringes,and the fringes are projected onto the surface to be measured.By employing the four step phase shift method and the phase unwrapping algorithm,the continuous phase of the surface is calculated,and the height information of curved surface is acquired.Finally,the 3D shape of the object is restored.In this paper,a wedge chip and a wood were tested,and the experimental results prove the feasibility of this method.Combined with a microscope,this method can be developed to measure 3D shape of microstructural.It has a great prospect in the field of micro measurement.
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刘光明,余学才,任华西,马飞,鲁楷锋.激光剪切干涉三维形貌测量[J].激光与红外,2018,48(4):464~468 LIU Guang-ming, YU Xue-cai, REN Hua-xi, MA Fei, LU Kai-feng. Three-dimensional shape measurement method based on laser shearing interference[J]. LASER & INFRARED,2018,48(4):464~468