大口径标准平面镜主动校正仿真分析
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基础研究计划项目(自然科学基金)(No.BK20160154)资助


Simulation analysis of large-aperture standard planar mirror based on active correction
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    摘要:

    为了让大口径标准平面镜能在多个不同工作状态下均能保持良好面形,采用主动校正的方法对重力引起的镜面支撑变形进行校正。整个支撑系统由主动校正系统和被动支撑系统组成,通过轴向支撑和侧向支撑相结合的被动支撑方式使标准平面镜保持平衡;当工作状态改变时,通过泽尼克拟合建立刚度矩阵,结合实际测得面形与最小二乘法计算校正力,将得到的相应的主动校正力作为第二级加载在轴向的支撑点上,使镜面面形恢复。仿真结果表明,不考虑镜子本身的加工误差,镜面改变45°时,主动支撑可将重力引起的面形误差从初始的RMS=λ/8(λ=632.8 nm)校正到λ/74;镜面改变90°时,主动支撑能将重力引起的面形误差从初始RMS=λ/6校正到λ/70。这种主动支撑方法能降低大口径标准平面镜在不同工作状态下引起的支撑变形,为大口径标准镜在多种工作状态下都能保持良好面形提供了依据。

    Abstract:

    In order to keep a good surface-profile in many different conditions,active correction is carried out to correct the surface-profile error of the large-aperture standard planar mirror. The support system consists of an active correction system and a passive support system. The mirror is balanced by a passive support system combining axial support and lateral support. When mirror's conditions changes,the active corrective forces are calculated by establishing stiffness matrix by Zerniker Polynomials and using the least square method. Then surface-profile of the mirror will be corrected by loading the active corrective forces on axial support. Regardless of the production error of the mirror and consider the influence by gravity,The simulation results show that When the mirror working in 45°,the surface-profile error can be corrected from the initial RMS=λ/8 (λ=632.8 nm)to λ/74.When it works horizontally,the surface-profile error can be corrected from the initial RMS=λ/6 to λ/70.The simulation results show that the active support method can keep a good surface-profile of large-aperture standard planar mirror in different conditions. It provides a basis that large-aperture standard planar mirror can maintain good surface-profile in many working conditions.

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许映杰,赵琦,李金鹏,焦长君.大口径标准平面镜主动校正仿真分析[J].激光与红外,2019,49(2):222~229
XU Ying-jie, ZHAO Qi, LI Jin-peng, JIAO Chang-jun. Simulation analysis of large-aperture standard planar mirror based on active correction[J]. LASER & INFRARED,2019,49(2):222~229

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  • 在线发布日期: 2019-03-07
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