Abstract:The spectral range of multi-channel spectrometer is 190~603 nm.Due to the less spectral lines in some bands,the conventional calibration method of mercury lamp cannot meet the requirements of the accuracy of spectral lines after calibration.In order to improve the precision of calibration,the spectral calibration of multi-channel spectrometer using elemental modulation is studied in this paper.Firstly,by analyzing the spectra of 13 sets of hollow cathode element lamps such as Ag,Zn,Mg,Hg,Bi,Mn,Cu,Na,Si,Ca,Cr,Se,As,etc.in the 190~603 nm band,the available spectral lines are selected,and the actual wavelength of the available spectral line is obtained by comparing the spectral line with the actual database.Then,the spectrum of 13 sets of hollow cathode element lamps is analyzed by using a multi-channel spectrometer to be calibrated,and the pixel points of the available spectral lines are obtained.Finally,the spectral calibration of each channel is realized by the least squares polynomial algorithm.After the calibration,the wavelength accuracy of the device is analyzed,and it is verified that the device after calibration by the element lamp can meet the wavelength accuracy requirements.