A new type of micro-tubes and their application in ultra large HgCdTe arrays were introduced in this paper.HgCdTe arrays processed with micro-tubes can be prepared using conventional metal deposition,lithography and etching equipment.During flip interconnection,HgCdTe chip interconnects with readout circuit by inserting indium ball in readout circuit through micro-tube electrode.Using micro-tube electrode interconnection,the interconnect pressure is about 65 % lower than the existing process.Furthermore in the flip interconnect process,the requirements of the chip flatness and interconnect accuracy were reduced,and the interconnect success rate was greatly improved.
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张轶,刘世光,张敏,杨斌. HgCdTe红外探测器芯片微管电极的制备与应用[J].激光与红外,2019,49(11):1350~1352 ZHANG Yi, LIU Shi-guang, ZHANG Min, YANG Bin. Development and application of microtubes for HgCdTe detectors[J]. LASER & INFRARED,2019,49(11):1350~1352