HgCdTe红外探测器芯片微管电极的制备与应用
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Development and application of microtubes for HgCdTe detectors
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    摘要:

    介绍了一种用于超大面阵碲镉汞探测器的新型微管电极。使用常规金属沉积、光刻和刻蚀设备,即可在碲镉汞芯片上制备微管电极。在倒装互连时,碲镉汞芯片通过微管电极插入读出电路上的铟球,实现与读出电路互连。使用微管电极互连,互连所需压力比现有工艺降低了约65 %,并降低了倒装互连工艺对碲镉汞芯片平坦度和互连精度的要求,大幅度提高了互连成功率。

    Abstract:

    A new type of micro-tubes and their application in ultra large HgCdTe arrays were introduced in this paper.HgCdTe arrays processed with micro-tubes can be prepared using conventional metal deposition,lithography and etching equipment.During flip interconnection,HgCdTe chip interconnects with readout circuit by inserting indium ball in readout circuit through micro-tube electrode.Using micro-tube electrode interconnection,the interconnect pressure is about 65 % lower than the existing process.Furthermore in the flip interconnect process,the requirements of the chip flatness and interconnect accuracy were reduced,and the interconnect success rate was greatly improved.

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张轶,刘世光,张敏,杨斌. HgCdTe红外探测器芯片微管电极的制备与应用[J].激光与红外,2019,49(11):1350~1352
ZHANG Yi, LIU Shi-guang, ZHANG Min, YANG Bin. Development and application of microtubes for HgCdTe detectors[J]. LASER & INFRARED,2019,49(11):1350~1352

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  • 在线发布日期: 2019-12-03
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