双截止透可见带通滤光片研制
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国家自然科学基金项目(No.60908041);上海市全固态激光器与应用技术重点实验室开放课题(No.2012ADL03);江苏省研究生创新项目(No.SJLX16_0492) 资助


Fabrication of dual-band cut-off for visible bandpass filter
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    摘要:

    为了实现蓝宝石基底上双截止透可见区的特性(截止带波长为0.3~0.4 μm、0.8~1.1 μm,通带波长为0.4~0.8 μm),初始结构采用双截止膜系,可截止近紫外和近红外,在蓝宝石基底的一侧实现可见光高透的宽通带滤光片,选用TiO2和SiO2分别作为薄膜高、低折射率材料,来实现双波段截止的目的,薄膜的设计层数为42层,总厚度是3.6 μm,采用电子束蒸发物理气相沉积法来实现镀制,并通过分光光度计测试镀制样品的透射率,测试结果显示截止区(0.3~0.385 μm和0.824~1.1 μm),平均截止深度分别达到了0.029 %和0.127 %,通带0.405~0.788 μm波段的平均透过率达到97.68 %,通带半宽度HFWD为398 nm(402~800 nm),有效地抑制了“半波孔”现象出现,并具有双波段截止和高通带透过率的特点。在环境测试中:薄膜的稳定性良好,膜层间匹配度适宜。因此,该双波段截止透可见滤光片可用于某些极端的环境条件中。

    Abstract:

    To realize the characters of a dual-band cut-off visible region that selectively transmit light of wavelengths of 0.4~0.8 μm but cut off the wavelengths of 0.3~0.4 μm and 0.8~1.1 μm on sapphire substrate.The dual-band cut-off film system that cut off near-infrared and near ultraviolet was chosen to be the initial structure which to be broad band-pass filter that is highly transparent in visible light on the side of the sapphire substrate.Titanium dioxide film material is selected as high refractive index material and silicon oxide film material as low refractive index material in order to achieve the purpose of dual-band cut-off.Through film system design,the thickness of 42 layers was 3.6 μm,the electron beam physical vapor deposition(EBPVD) was used to fabricate the coatings;the transmittance of the sample was measured from the spectrophotometer.The average cut-off depth of 0.029 % and 0.127 % corresponded to the band from 0.3~0.385 μm and the band from 0.824~ 1.1 μm respectively from the test result.The average transmittance was up to 97.68 % for the pass band from 0.405~0.788 μm,the half-width HFWD of the passband is 398 nm(402~800 nm),which the “half-wave hole” phenomenon is effectively suppressed and has the characteristics of double-band cut-off and high passband transmittance.In the environmental tests:the coatings was remarkably stable and matched with each other well.So that the dual-band cut-off visible filter can be applied in extreme cases.

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齐健,苏宙平,胡立发,朱华新,何一峰.双截止透可见带通滤光片研制[J].激光与红外,2019,49(12):1472~1477

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  • 在线发布日期: 2019-12-24
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