Chemical polishing technology can influence HgCdTe films material composition uniformity,and the performance of chip become worse.In order to resolve this problem,a step-by-step chemical polish technology is processed.The results of material surface analysis and component analysis show that the step-by-step chemical polishing can reduce the roughness of material surface,improve the uniformity of chemical polishing material components,effectively remove the oxidation of material surface,and contribute to the improvement of the uniformity of detector chip performance.