White light interferometry is a special interferometry technique that uses white light with a certain spectral width instead of monochromatic light as an interference source.According to the characteristics that the coherence length of the white light interference signal is short and the coherence peak is very obvious,the interference signal is obtained by the vertical scanning interferometry.The coherent peak addressing method is proposed based on the vertical scanning measurement,and has high calculation accuracy and large applicability.In this paper,the 11 algorithms of the coherent peak addressing method are divided into direct solution method,envelope curve fitting method and weighted average method.The advantages and disadvantages of various algorithms,as well as applicability and limitations are analyzed by simulating each algorithm.
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汝洪武,张文喜,吴玲玲.白光干涉垂直扫描测量算法综述[J].激光与红外,2020,50(8):899~906 RU Hong-wu, ZHANG Wen-xi, WU Ling-ling. A survey of white light interference vertical scan measurement algorithms[J]. LASER & INFRARED,2020,50(8):899~906