This article introduces a test Dewar variable temperature Dewar device(referred to as variable temperature Dewar),which can continuously test chip performance under multiple temperature conditions(60~300 K).Compared with the traditional middle-measured liquid nitrogen Dewar,the variable temperature Dewar is smaller and can be coupled with the refrigerator to achieve multiple temperature adjustments.In addition,the temperature-variable Dewar frame components are designed as a detachable structure,which can not only be compatible with chips of various specifications,but also improve the test efficiency of the chips performance.Through experimental tests,the temperature uniformity of the chip substrate area of the variable temperature Dewar component is 0.6 K.Within 10 minutes after the chip is loaded,the temperature control stability of variable temperature Dewar is 0.69 K,which can meet the needs of the project(Temperature control stability is within ± 3 K).
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