张轶,牛峻峰,龚志红,刘世光,吴卿,王成刚.光刻工艺对大面阵长波碲镉汞芯片性能的影响[J].激光与红外,2021,51(2):202~205
ZHANG Yi, NIU Jun-feng, GONG Zhi-hong, LIU Shi-guang, WU Qing, WANG Cheng-gang. Effect of lithography on the performance of long-wavelength HgCdTe detector[J]. LASER & INFRARED,2021,51(2):202~205